仪器设备
- Nanofabrication Facilities
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ØNanofabrication:
We have full access to the Nanofabrication Facility in SINANO.
n Thin Film DepositionEbeam EvaporationICPCVD
ULVAC Ei-5z
Oxford PlasmaPro 380Magnetron SputteringALD
FHRPEALD R200n LithographyEbeam Lithography #1Ebeam Lithography #2
JEOL JBX5500ZA
Raith eLINE PlusMask AlignerStepper
Karl Suss MA6/BA6Nikon-I7 NSR 2205i12Dn Dry EtchingICP-RIE #1 (SiO2、SiNx)ICP-RIE #2 (Si)
STS AOE
STS HRMICP-RIE #3 (III-V)Oxygen Plasma Etcher
Oxford PlasmaPro 180March AP-100We also have full access to the Vacuum Interconnected Nano-X Research Facility in SINANO, the largest multi-functional research platform in the world for nano-science and nanotechnology, which integrates the state-of-art capabilities of material growth, device fabrication and characterization/tests together under one ultra-high vacuum environment.
